1.

Conference Proceedings
Conference Proceedings
1. Flexible Organic Electronics: The Role of Plasma Deposition in Multi-layer Permeation Barrier Technology
M. Creatore ; V.I.T.A. Lohmann ; M.A. Blauw ; M.C.M. van de Sanden
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.143-146,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
2.

Conference Proceedings
Conference Proceedings
2. Ion Flux Measurements in a Remote High Rate Depositing Plasma Using a Pulse Shape Capacitive Probe
M.C. Petcu ; A.C. Bronneberg ; M.A. Blauw ; M. Creatore ; M.C.M. van de Sanden
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.593-597,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
3.

Conference Proceedings
Conference Proceedings
3. High-Rate Anisotropic Silicon Etching with the Expanding Thermal Plasma Technique
M.A. Blauw ; P. Van Lankvelt ; F. Roozeboom ; E. Kessels ; R. van de Sanden
Pub. info.: Chemical Sensors 7 and MEMS/NEMS 7.  pp.291-298,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(10)