1.

Conference Proceedings
Conference Proceedings
1. Investigation of Reactively Sputtered Titania Thin Films Prepared by DC, Pulsed and Highly Ionized Pulsed Power Magnetron Sputtering
R. Bandori ; M. Vergöhl ; K. Schiffmann ; T. Wallendori
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.21-26,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
2.

Conference Proceedings
Conference Proceedings
2. Properties of ZrO₂ Thin Films Deposited by Plasma Assisted Pulsed Reactive Magnetron Sputtering
M. Vergöhl ; O. Werner ; S. Bruns
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.492-497,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
3.

Conference Proceedings
Conference Proceedings
3. Deposition of Multilayer Optical Films and Rugate Filters Deposited by Reactive Magnetron Sputtering
M. Vergöhl ; C. Rickers ; U. Kricheldorf ; K. Schiffmann ; P. Giesel ; R. Dittrich ; U. Richter
Pub. info.: 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C..  pp.265-270,  2006.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 49
4.

Conference Proceedings
Conference Proceedings
4. Dynamic Simulation of Process Control of the Reactive Sputter Process Using Two Separate Targets and Experimental Results
N. Malkomes ; A. Bierhals ; B. Szyszka ; M. Vergöhl
Pub. info.: 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania.  pp.13-19,  2001.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 44
5.

Conference Proceedings
Conference Proceedings
5. Superimposed MF-HiPIMS Processes for the Deposition of ZrO₂ Thin Films
M. Vergöhl ; O. Werner ; S. Bruns ; T. Wallendorf ; G. Mark
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.307-312,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
6.

Conference Proceedings
Conference Proceedings
6. Research on Promising Applications for High Power Pulse Magnetron Sputtering
V. Sittinger ; B. Szyszka ; R. Bandorf ; M. Vergöhl ; A. Pflug ; D.J. Christie ; F. Ruske
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.293-301,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
7.

Conference Proceedings
Conference Proceedings
7. Preparation of Photocatalytically Active TiO₂ Layers on Polycarbonate by Reactive Magnetron Sputtering
T. Neubert ; O. Werner ; F. Neumann ; M. Vergöhl
Pub. info.: 51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL.  pp.143-147,  2008.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 51
8.

Conference Proceedings
Conference Proceedings
8. Comparison of Different Concepts for the Stabilization of Reactive Sputtering Processes Decorative & Functional Coating
N. Malkomes ; A. Pflug ; B. Szyszka ; M. Vergöhl
Pub. info.: 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida.  pp.41-48,  2002.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 45
9.

Conference Proceedings
Conference Proceedings
9. Large Area Deposition of Transparent and Conductive ZnO:Al Layers by Reactive Mid Frequency Magnetron Sputtering
B. Szyszka ; T. Höing ; X. Jiang ; A. Bierhals ; N. Malkomes ; M. Vergöhl ; V. Sittinger ; U. Bringmann ; G. Bräuer
Pub. info.: 44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania.  pp.272-276,  2001.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 44
10.

Conference Proceedings
Conference Proceedings
10. In-situ Spectroscopic Ellipsometry and Plasma Control for Large-Scale Magnetron Sputter Deposition Processes
M. Vergöhl ; N. Malkomes ; T. Matthée ; G. Bräuer ; U. Richter ; F.-W. Nickolc ; J. Bruch
Pub. info.: 43rd Annual Technical Conference proceedings, April 15-20, 2000, Denver, Colorado.  pp.11-16,  2000.  Albuquerque, NM.  Society of Vacuum Coaters
Title of ser.: Annual Technical Conference of Society of Vacuum Coaters
Ser. no.: 43