1.

Conference Proceedings
Conference Proceedings
1. Influence of Growth Pressure and Addition of HCl Gas on Growth Rate of 4H-SiC Epitaxy
T. Tanaka ; N. Kawabata ; Y. Mitani ; M. Sakai ; N. Tomita
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.133-136,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
2.

Conference Proceedings
Conference Proceedings
2. Blocking Characteristics of 2.2 kV and 3.3 kV-Class 4H-SiC MOSFETs with Improved Doping Control for Edge Termination
K. Wada ; K. Uchida ; R. Kimura ; M. Sakai ; S. Hatsukawa
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.915-918,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
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Conference Proceedings
Conference Proceedings
3. Image sensor for object detection using modulated light
H. Taruki ; A. Ohno ; F. Ono ; T. Hamamoto ; T. Sasaki ; T. Shirai ; M. Sakai
Pub. info.: Sensors, cameras, and systems for scientific/industrial applications VIII : 30 January-1 February 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6501
4.

Conference Proceedings
Conference Proceedings
4. Application of two-fluid nozzles for advanced photomask cleaning process
K. Masui ; T. Takemoto ; K. Otsubo ; M. Sakai ; T. Higaki
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.702809-1-702809-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
5.

Conference Proceedings
Conference Proceedings
5. Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication
H. Sakurai ; M. Terayama ; M. Sakai ; M. Itoh ; O. Ikenaga
Pub. info.: Photomask technology 2008.  1  pp.71220D-1-71220D-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
6.

Conference Proceedings
Conference Proceedings
6. Cell imaging by transient fluorescence detected infrared microscopy
T. Ohmori ; M. Sakai ; M. Ishihara ; M. Kikuchi ; M. Fujii
Pub. info.: Biomedical optical spectroscopy : 19-21 and 23 January 2008, San Jose, California, USA.  pp.685307-1-685307-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6853