1.

Conference Proceedings
Conference Proceedings
1. Defect Generation in High-K Dielectric Stacks: Characterization and Modelling
M. Houssa ; J. L. Autran ; V. V. Afanas'ev ; A. Stesmans ; M. M. Heyns
Pub. info.: Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues.  pp.113-124,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-28
2.

Conference Proceedings
Conference Proceedings
2. Alternative Gate Dielectric Materials
S. Van Elshocht ; A. Hardy ; S. De Gendt ; C. Adelmann ; P. K. Baumann ; D. P. Brunco ; M. R. Caymax ; F. Conard ; P. Delugas ; P. Lehnen ; O. Richard ; E. Rohr ; D. Shamiryan ; A. Vos ; F. Witters ; P. Zimmerman ; M. K. Van Bael ; J. Mullens ; M. M. Meuris ; M. M. Heyns
Pub. info.: Physics and technology of high-k gate dielectrics 4.  pp.479-498,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(3)
3.

Conference Proceedings
Conference Proceedings
3. EVALUATION OF THE DEGREE OF DAMAGE AFTER DIFFERENT CONDICTIONS OF He/H₂ STRIP PLASMA ON SILICA-BASED POROUS LOW-к MATERIALS - COMPATIBILITY STUDY WITH CHEMICAL SOLUTIONS
E. Kesters ; Q. T. Le ; W. Boullart ; Q. Han ; I. Berry ; C. Waldfried ; P. W. Mertens ; M. M. Heyns
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.319-326,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)