1.

Conference Proceedings
Conference Proceedings
1. Simple Models for Stacking-Fault Formations in 4H-SiC Epitaxial Layer
M. Kitabatake
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.331-334,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
2.

Conference Proceedings
Conference Proceedings
2. Development of “Si-Vapor Etching” and “Si Vapor Ambient Anneal” in TaC/Ta Composite Materials
N. Yabuki ; S. Torimi ; S. Nogami ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.719-722,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
3.

Conference Proceedings
Conference Proceedings
3. Normally-Off 1400V/30A 4H-SiC DACFET and its Application to DC-DC Converter
M. Kitabatake ; M. Tagome ; S. Kazama ; K. Yamashita ; K. Hashimoto
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.913-918,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of F-N Tunneling Emission Current in MOS Capacitor Fabricated on Step Bunching
K. Yamada ; O. Ishiyama ; H. Sako ; J. Senzaki ; M. Kitabatake
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.472-475,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
5.

Conference Proceedings
Conference Proceedings
5. The Integrated Evaluation Platform for SiC Wafers and Epitaxial Films
M. Kitabatake ; J. Sameshima ; O. Ishiyama ; K. Tamura ; H. Ohshima
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.451-454,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
6.

Conference Proceedings
Conference Proceedings
6. Analysis on Generation of Localized Step-Bunchings on 4H-SiC(0001)Si Face by Synchrotron X-Ray Topography
M. Sasaki ; K. Tamura ; H. Sako ; M. Kitabatake ; K. Kojima
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.398-401,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
7.

Conference Proceedings
Conference Proceedings
7. Electrical Characteristics/Reliability Affected by Defects Analyzed by the Integrated Evaluation Platform for SiC Epitaxial Films
M. Kitabatake ; H. Sako ; M. Sasaki ; T. Yamashita ; K. Tamura
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.979-984,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
8.

Conference Proceedings
Conference Proceedings
8. Low Energy Electron Channeling Contrast Imaging from 4H-SiC Surface by SEM and its Comparison with CDIC-OM and PL Imaging
K. Ashida ; T. Aiso ; M. Okamoto ; H. Seki ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.193-196,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
9.

Conference Proceedings
Conference Proceedings
9. Improving Mechanical Strength and Surface Uniformity to Prepare High Quality Thinned 4H-SiC Epitaxial Wafer Using Si-Vapor Etching Technology
S. Torimi ; K. Ashida ; N. Yabuki ; M. Shinohara ; T. Sakaguchi ; Y. Teramoto ; S. Nogami ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.375-378,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897