1.

Conference Proceedings
Conference Proceedings
1. Use of in-line AFM as LWR verification tool in 45nm process development
M. H. Hsieh ; K. H. Shi ; J. H. Yeh ; R. H. Hsu ; M. Tsai ; S. F. Tzou
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. High-power GaN LED chip with low thermal resistance
S. Hon ; C. T. Kuo ; T. P. Chen ; M. H. Hsieh
Pub. info.: Gallium nitride materials and devices III : 21-24 January 2008, San Jose, California, USA.  pp.689411-1-689411-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6894