1.

Conference Proceedings
Conference Proceedings
1. Effect of Ion Enery and Dose on the Diffusion of Silicon Implanted into Gallium Arsenide
C. C. Lee ; M. D. Deal ; J. C. Bravman
Pub. info.: Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII).  pp.309-315,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-27
2.

Conference Proceedings
Conference Proceedings
2. Modeling the Diffusion Behavior of Implanted Beryllium in Gallium Arsenide Using Suprem - IV
C.J. Hlu ; M. D. Deal ; H. G. Robinson ; J. D. Plummer
Pub. info.: Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII).  pp.296-308,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-27