1.

Conference Proceedings
Conference Proceedings
1. Using Thermal Oxidation and Rapid Thermal Annealing on Polycrystalline-SiGe for Ge Nanocrystals
Chyuan-Haur Kao ; C. S. Lai ; M. C. Tsai ; C. H. Lee ; C. S. Huang ; C. R. Chen
Pub. info.: Materials science and technology for nonvolatile memories : symposium held March 24-27, 2008, San Francisco, California, U.S.A..  pp.55-62,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1071
2.

Conference Proceedings
Conference Proceedings
2. Transition from precise to accurate critical dimension metrology
V. A. Ukraintsev ; M. C. Tsai ; T. Lii ; R. A. Jackson
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Design for manufacturing approach to second level alternating phase shift mask patterning
S. Henrichs ; M. Chandramouli ; M. C. Tsai
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
4.

Conference Proceedings
Conference Proceedings
4. Highly strained InGaAs lasers grown by MOVPE with low threshold current density
W. C. Chen ; Y. K. Su ; R. W. Chuang ; M. C. Tsai
Pub. info.: Novel in-plane semiconductor lasers VI : 22-25 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6485