V. Farys ; S. Gaugiran ; D. Cruau ; K. Mestadi ; S. Warrick ; M. Benndorf ; R. Feilleux ; C. Sourd
Pub. info.:
EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering