1.

Conference Proceedings
Conference Proceedings
1. Nanomachining photomask repair of complex patterns
T. Robinson ; A. Dinsdale ; M. Archuletta ; R. Bozak ; R. White
Pub. info.: Photomask technology 2008.  1  pp.71221I-1-71221I-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
2.

Conference Proceedings
Conference Proceedings
2. Nanomachining processes for 45, 32 nm node mask repair and beyond
T. Robinson ; A. Dinsdale ; R. Bozak ; R. White ; M. Archuletta
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.70281A-1-70281A-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
3.

Conference Proceedings
Conference Proceedings
3. Practical laser mask repair in the contemporary production environment
T. Robinson ; R. White ; M. Archuletta ; R. Bozak
Pub. info.: Photomask technology 2008.  1  pp.71221J-1-71221J-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122