Murakami, Masanori ; Hallali, P. -E. ; Price, W> H. ; Norcott, M. ; Lustig, N. ; Kim, H. -J. ; Wright, S. L. ; LaTulipe, D.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.233-242, 1990. Pittsburgh, Pa.. Materials Research Society