Luo, Li ; Nastasi, M. ; Maggiore, C. J. ; Finizzotto, R. F. ; Yang, H. ; Namavar, F.
Pub. info.:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.923-928, 1992. Pittsburgh, Pa.. Materials Research Society