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27 results

Conference Proceedings

1. STRUCTURAL EFFECTS IN Al (111)/Si(111) HETEROEPITAXY BY PARTIALLY IONIZED BEAM DEPOSITION

Yapsir, A.S. ; Choi, C.-H. ; Yang, S.-N. ; Lu, T.-M. ; Madden, M. ; Tracy, B.

Pub. info.:	Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.465-470, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	116

Conference Proceedings

2. FLUORINATED PARYLENE AS AN INTERLAYER DIELECTRIC FOR THIN FILM MCM"S

Dabral, S. ; Zhang, X. ; Wu, X. M. ; Yang, G.-R. ; Langm C.-I. ; Bakhru, H. ; Olson,R. ; Lu, T.-M. ; McDonald, J. F

Pub. info.:	Electronic packaging materials science VI : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.83-90, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	264

Conference Proceedings

3. Thin film characterization using terahertz differential time-domain spectroscopy and double modulation

Mickan, S.P. ; Lee, K.-S. ; Lu, T.-M. ; Barnat, E. ; Munch, J. ; Abbott, D. ; Zhang, X.-C.

Pub. info.:	Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia. pp.197-209, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4591

Conference Proceedings

4. Low Temperature Deposition of High Dielectric Films Using Reactive Pulsed DC Magnetron Sputtering

Nielsen, M.C. ; Kim, J.-Y. ; Rymaszewski, E.J. ; Lu, T.-M.

Pub. info.:	Dielectric material integration for microelectronics. pp.227-240, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

5. Integrated Discrete Components

Rymaszewski, E.J. ; Lu, T.-M. ; Nielsen, M.C. ; Kim, J.-Y.

Pub. info.:	Dielectric material integration for microelectronics. pp.216-226, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-3

Conference Proceedings

6. *PARTIALLY IONIZED BEAM DEPOSITION OF THIN FILMS

Lu, T.-M.

Pub. info.:	Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.. pp.207-216, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	147

Conference Proceedings

7. Al/Si INTERFACE CHARACTERISTICS FORMED BY PARTIALLY IONIZED BEAM DEPOSITION AT 2.5KV

Wong, J. ; Lam, C. ; Lu, T.-M.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.189-194, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

8. *LOW TEMPERATURE PROCESSING FOR MULTILEVEL INTERCONNECTION AND PACKAGING

Lu, T.-M. ; McDonald, J. F. ; Dabral, S. ; Yang, G. -R. ; You, L. ; Bai, P.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.55-66, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

9. EFFECTS OF SELF-ION BOMBARDMENT ON A1/Si(n) SCHOTTKY BARRIER FORMATION

Wong, J. ; Mei, S.-N. ; Lu, T.-M.

Pub. info.:	Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.. pp.211-216, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	77

10.

Conference Proceedings

10. THE IMPORTANCE OF SELF-SPUTTERING BY LOW ENERGY IONS IN PARTIALLY IONIZED BEAM DEPOSITION

Bai, P. ; Steinbruchel, Ch. ; Lu, T.-M.

Pub. info.:	Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.55-60, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	157

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