1.

Conference Proceedings
Conference Proceedings
1. Dynamic studies of holographic gratings in dye-doped liquid-crystal films (Invited Paper)
Fuh, A.Y.-G. ; Liao, C.-C. ; Hsu, K.-C. ; Lu, C.-L. ; Tsai, C.-Y.
Pub. info.: Liquid crystals VI : 8-9 July 2002, Seattle, Washington, USA.  pp.17-21,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4799
2.

Conference Proceedings
Conference Proceedings
2. Study of loading effect on dry etching process
Chang, S.-M. ; Chin, C.-C. ; Wang, W.-C. ; Lu, C.-L. ; Chin, S.-C.J. ; Hsieh, H.C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.228-233,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Mask pattern fidelity quantification
Wang, W.-C. ; Chang, S.-M. ; Chin, C.C. ; Lu, C.-L. ; Chin, A.S.J. ; Hsieh, H.-C. ; Yu, S.-S.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.266-275,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
4.

Conference Proceedings
Conference Proceedings
4. Mask-making study for the 65-nm node
Chen, C.-J. ; Lee, H.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Chen, W.-C. ; Hsieh, H.-C. ; Lin, B.-J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.673-683,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
5.

Conference Proceedings
Conference Proceedings
5. Global CD uniformity improvement in mask manufacturing for advanced lithography
Chang, S.-M. ; Chin, C.C. ; Wang, W.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Tsay, C.-S. ; Yen, Y.-S. ; Chin, S.-C. ; Lee, H.-C. ; Liu, R.-G. ; Chen, K.-S. ; Hsieh, H.-C. ; Ku, Y.C. ; Lin, J.C.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1065-1071,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings
Conference Proceedings
6. Laser-induced reorientation effect and ripple structure in dye-doped liquid crystal films
Fuh, A.Y.G. ; Liao, C.-C. ; Hsu, K.-C. ; Lu, C.-L.
Pub. info.: Liquid Crystals VII.  pp.194-200,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5213