1.

Conference Proceedings

Conference Proceedings
Seiler, D.G. ; Lowney, J.R. ; Littler, C.L. ; Yoon, I.T.
Pub. info.: Long-wavelength semiconductor devices, materials, and processes : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.59-64,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 216
2.

Conference Proceedings

Conference Proceedings
Villarrubia, J.S. ; Vladar, A.E. ; Lowney, J.R. ; Postek, M.T., Jr.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.304-312,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689