1.

Conference Proceedings
Conference Proceedings
1. Incidence of Deposition Parameters on the Structural Properties of Y2O3 Grown by Pulsed Injection PE-MOCVD
Durand, C. ; Vallee, C. ; Salicia, O. ; Loup, V. ; Bonavalot, M ; Joubert, O. ; Dubourdieu, C.
Pub. info.: Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium.  pp.8-13,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-13
2.

Conference Proceedings
Conference Proceedings
2. (19.3) 1:50 - 2:10 PM - Understanding and Improvement of the SiGe Wet Selective Etch for the sSOI Manufacturing by the Smart Cut Process
Rayssac, O. ; Besson, P. ; Loup, V. ; Aulnette, C. ; Favier, S. ; Osternaud, B. ; Portigliatti, L. ; Cayrefourcq, I. (SOITEC)
Pub. info.: SiGe: materials, processing, and devices : proceedings of the First international symposium.  pp.1135-1144,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-07