1.

Conference Proceedings
Conference Proceedings
1. X-ray Photoemission Spectromicroscopy of GaN and AlGaN
Lorusso, G. F. ; Solak, H. ; Cerrina, F. ; Underwood, J. H. ; Batson, P. J. ; Kim, Y. ; Cho, Y. ; Kisielowski, C. ; Krueger, J. ; Weber, E. R.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.393-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
2.

Conference Proceedings
Conference Proceedings
2. In-Situ X-ray Photoemission Spectromicroscopy of Electromigration in Patterned Al-Cu Lines With MAXIMUM
Solak, H. H. ; Lorusso, G. F. ; Singh, S. ; Cerrina, F. ; Underwood, J. H. ; Batson, P.
Pub. info.: Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.39-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 516
3.

Conference Proceedings
Conference Proceedings
3. MAXIMUM AT ALS: A Powerful Tool to Investigate Open Problems in Micro- and Optoelectronics
Lorusso, G. F. ; Solak, H. ; Singh, S. ; Batson, P. J. ; Underwood, J. H. ; Cerrina, F.
Pub. info.: Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A..  pp.215-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 524
4.

Conference Proceedings
Conference Proceedings
4. Advanced DFM applications using design-based metrology on CD SEM [6152-194]
Lorusso, G. F. ; Capodieci, L. ; Stoler, D. ; Schulz, B. ; Roling, S. ; Schramm, J. ; Tabery, C. ; Shah, K. ; Singh, B. ; Abbott, G. ; Azordegan, A. ; Heinrichs, L. ; Kaliblotzky, Z. ; Castel, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
5.

Conference Proceedings
Conference Proceedings
5. An integrated approach to the determination of a manufacturable process window in advanced microlithography [6152-118]
Cusacovich, M. ; Robinson, J. C. ; Cheng, S. ; Storms, G ; Leray, P. ; Lorusso, G. F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615231-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
6.

Conference Proceedings
Conference Proceedings
6. Impact of line width roughness on device performance [6152-32]
Lorusso, G. F. ; Leunissen, L. H. A. ; Gustin, C. ; Mercha, A. ; Jurczak, M. ; Marchman, H. M. ; Azordegan, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152