1.

Conference Proceedings
Conference Proceedings
1. Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films
Young, David L. ; Stradins, Paul ; Iwaniczko, Eugene ; To, Bobby ; Reedy, Bob ; Yan, Yanfa ; Branz, Howard M. ; Lohr, John ; Alvarez, Manuel ; Booske, John ; Marconnet, Amy ; Wang, Qi
Pub. info.: Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.223-238,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 862
2.

Conference Proceedings
Conference Proceedings
2. Millisecond Microwave Annealing : Reaching the 32 nm Node
Thompson, Keith ; Booske, John H. ; Ives, R.L. ; Lohr, John ; Gorelov, Yurii A. ; Kajiwara, Ken
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.209-214,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810