1.

Conference Proceedings

Conference Proceedings
Loewenstein, Lee M. ; Mertens, Paul W.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.512-519,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings

Conference Proceedings
Loewenstein, Lee M. ; Huffman, Craig H. ; Davis, Cecil J,
Pub. info.: Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.267-272,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 98
3.

Conference Proceedings

Conference Proceedings
Loewenstein, Lee M. ; Krishnan, Srikanth ; Brown, George A.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.225-234,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20