1.

Conference Proceedings
Conference Proceedings
1. Chemical Vapor Deposition and Properties of Amorphous Aluminum Oxide Films
Gordon, Roy G. ; Kramer, Keith ; Liu, Xinye
Pub. info.: Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A..  pp.383-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 446
2.

Conference Proceedings
Conference Proceedings
2. New Liquid Precursors for Chemical Vapor Deposition
Gordon, Roy G. ; Chen, Feng ; Diceglie, Nicholas J., Jr. ; Kenigsberg, Amos ; Liu, Xinye ; Teff, Daniel J. ; Thornton, John
Pub. info.: Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.63-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 495
3.

Conference Proceedings
Conference Proceedings
3. Atomic Layer Deposition of Aluminum Nitride Thin Films From Trimethyl Aluminum (TMA) and Ammonia
Liu, Xinye ; Ramanathan, Sasangan ; Lee, Eddie ; Seidel, Thomas E.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.11-18,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
4.

Conference Proceedings
Conference Proceedings
4. Atomic Layer Deposition of Hafnium Oxide Thin Films From Tetrakis(dimethylamino)Hafnium (TDMAH) and Ozone
Liu, Xinye ; Ramanathan, Sasangan ; Seidel, Thomas E.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.97-102,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765