1.

Conference Proceedings
Conference Proceedings
1. METHOD FOR EVALUATION AND OPTIMIZATION OF PARTICLE REMOVAL PROCESSES
Narayanswami, N. ; Ruether, P.A. ; Thomes, G. ; Weygand, J.F. ; Lee, N.-P. ; Christenson, K.K. ; Butterbaugh, J.W. ; Hoo, S.H. ; Liu, B.Y.H.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.469-476,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering
Huff, H.R. ; Goodall, R.K. ; Williams, E. ; Woo, K-S. ; Liu, B.Y.H. ; Warner, T. ; Hirleman, D. ; Gildersleeve, K. ; Bullis, W.M. ; Seheer, B.W. ; Stover, J.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.365-383,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5