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Conference Proceedings

1. Rapid large area annealing of ion-implanted Si with incoherent light

Lischner, D.J. ; Celler, G.K.

Pub. info.:	Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.759-764, 1982. New York. North Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	4

Conference Proceedings

2. Characterization of ion-implanted Si rapidly annealed with incoherent light

Benton, J.L. ; Celler, G.K. ; Jacobson, D.C. ; Kimerling, L.C. ; Lischner, D.J. ; Miller, G.L. ; Robinson, Mc.D.

Pub. info.:	Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.765-770, 1982. New York. North Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	4