1.

Conference Proceedings
Conference Proceedings
1. Litho-metrology challenges for the 45-nmtechnology node and beyond (Invited Paper) [6152-12]
Allgair, J. A. ; Bunday, B. D. ; Bishop, M. ; Lipscomb, P. ; Orji, N. G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. The limits of image-based optical metrology (Invited Paper) [6152-35]
Silver, R. M. ; Barnes, B. M. ; Attota, R. ; Jun, J. ; Filliben, J. ; Soto, J. ; Stocker, M. ; Lipscomb, P. ; Marx, E. ; Patrick, H. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152