1.

Conference Proceedings
Conference Proceedings
1. Manufacturing challenges for sub-half-micron technologies
Liou,F.-T.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II.  pp.2-11,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2638
2.

Conference Proceedings
Conference Proceedings
2. Manufacturing challenges for sub-half-micron technologies
Liou,F.-T.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology.  pp.2-13,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2636
3.

Conference Proceedings
Conference Proceedings
3. Plasma charging effects on device degradation from via sputter etch
Vishnubhotla,L. ; Ling,J. ; Huang,J. ; Wu,Y. ; Smith,G. ; Zamanian,M. ; Liou,F.-T. ; Ashtiani,K.A. ; Nicholas,M.D.Mc
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology.  pp.44-51,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2636
4.

Conference Proceedings
Conference Proceedings
4. Manufacturing challenges for sub-half-micron technologies
Liou,F.-T.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis.  pp.2-11,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2635
5.

Conference Proceedings
Conference Proceedings
5. Manufacturing challenges for sub-half-micron technologies
Liou,F.-T.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing.  pp.2-11,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2637