Awadelkarim, O.O. ; Henry, A. ; Monemar, B. ; Lindstrom, J.L.
Pub. info.:
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.283-286, 1990. Pittsburgh, Pa.. Materials Research Society
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.377-382, 1990. Pittsburgh, Pa.. Materials Research Society
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.65-68, 1986. Pittsburgh, Pa.. Materials Research Society