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11 results

Conference Proceedings

1. Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth

Lauwers, Anne ; Lindsay, Richard ; Henson, Kirklen ; Severi, Simone ; Akheyar, Amal ; Pawlak, Bartek J. ; Potter, Muriel de ; Maex, Karen

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.43-48, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

2. Applications of Ni-Based Silicides to 45 nm CMOS and Beyond

Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Pawlak, Malgorzata A. ; Dal, Mark Van ; Akheyar, Amal ; Potter, Muriel De ; Kottantharayil, Anil ; Pourtois, Geoffrey ; Lindsay, Richard ; Maex, Karen

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.31-42, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

3. Channel Engineering and Junction Overlap Issues for Ultra-Shallow Junctions Formed by SPER in the 45 nm CMOS Technology Node

Severi, Simone ; Henson, Kirklen ; Lindsay, Richard ; Lauwers, Anne ; Pawlak, Bartek J. ; Surdeanu, Radu ; Meyer, K.De

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.455-462, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

4. Linewidth Dependence Of The Reverse Bias Junction Leakage For Co-Silicided Source/Drain Junctions

Lauwers, Anne ; Potter, Muriel de ; Lindsay, Richard ; Chamirian, Oxana ; Demeurisse, Caroline ; Vrancken, Christa ; Maex, Karen

Pub. info.:	Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.29-34, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	716

Conference Proceedings

5. Analysis Of Silicide/Diffusion Contact Resistance Making Use Of Transmission Line Structures

Akheyar, Amal ; Lauwers, Anne ; Lindsay, Richard ; Potter, Muriel de ; Tempel, Georg ; Maex, Karen

Pub. info.:	Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.53-58, 2002. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	716

Conference Proceedings

6. Silicides for 65 nm CMOS and Beyond

Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Dal, Mark Van ; Akheyar, Amal ; Richard, Olivier ; Lisoni, Judit G. ; Potter, Muriel De ; Lindsay, Richard ; Maex, Karen

Pub. info.:	CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.267-278, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	765

Conference Proceedings

7. Ni Silicide Morphology On Small Features

Chamirian, Oxana ; Lauwers, Anne ; Kittl, Jorge A. ; Dal, Mark Van ; Potter, Muriel De ; Vrancken, Christa ; Lindsay, Richard ; Maex, Karen

Pub. info.:	Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.147-152, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	810

Conference Proceedings

8. Shallow Junctions for Sub-100 nm CMOS Technology

Meyssen, Veerle ; Stolk, Peter ; Zijl, Jeroen van ; Berkum, Jurgen van ; Wijgert, Willem van de ; Lindsay, Richard ; Dachs, Charles ; Mannino, Giovanni ; Cowern, Nick

Pub. info.:	Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	669

Conference Proceedings

9. Optimization of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm Cmos

Lindsay, Richard ; Pawlak, Bartlomiej J. ; Stolk, Peter ; Maex, Karen

Pub. info.:	Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.65-76, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	717

10.

Conference Proceedings

10. Electrical Activity of B and As Segregated at the Si-SiO2 Interface

Fruhauf, Jens ; Lindsay, Richard ; Bergmaier, Andreas ; Vandervorst, Wilfried ; Tempel, Georg ; Maex, Karen ; Dollinger, Gunther ; Koch, Frederick

Pub. info.:	Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.115-120, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	717

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