Enabling technology for simulation science II : 14-16 April, 1998, Orlando, Florida. pp.120-126, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA. pp.335-342, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering