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11 results

Conference Proceedings

1. COMPARISON BETWEEN ION-BEAM AND THERMAL-ANNEALING INDUCED SOLID PHASE EPITAXY IN Fe-IMPLANTED Si

Lin, X. W. ; Desimoni, J. ; Bernas, H. ; Liliental-Weber, Z. ; Washburn, J.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.97-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

2. Metallurgical and electrical properties of capped Au-based metallizations on GaAs

Lin, X. W. ; Piotrowska, A. ; Kaminska, E. ; Liliental-Weber, Z. ; Washburn, J.

Pub. info.:	III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.285-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	300

Conference Proceedings

3. Self-Aligned Gate Metallization Processes With Low-Thermal Budget

Lin, X. W. ; Weling, M.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.485-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

4. Integration of NiSi Salicide for Deep Submicron CMOS Technologies

Lin, X. W. ; Ibrahim, N. ; Topete, L. ; Pramanik, D.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.179-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

5. EVOLUTION OF CUBIC FeSi2 IN Si UPON THERMAL ANNEALING

Lin, X. W. ; Desimoni, J. ; Bernas, H. ; Liliental-Weber, Z. ; Washburn, J.

Pub. info.:	Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.. pp.293-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	311

Conference Proceedings

6. Analysis of Copper and Low-K Dielectric Interconnect System for 0.18-ｦﾌm Technology

Lin, X. W. ; Hui, K. ; Chanderhari, K. ; Bothra, S. ; Pramanik, D. ; Findley, P.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.399-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

7. Structural Processes in Gold-Based Metallization during the Formation of Ohmic Contacts to GaSb

Piotrowska, A. ; Kaminska, E. ; Guziewicz, M. ; Mizera, E. ; Dynowska, E. ; Lin, X. W. ; Rouvimov, S. ; Liliental-Weber, Z. ; Kwiatkowski, S.

Pub. info.:	Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.669-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	403

Conference Proceedings

8. CORRELATION BETWEEN THE MICROSTRUCTURES AND THE ELECTRICAL PROPERTIES OF Ni/Au/Te/Au CONTACTS ON n-GaAs

Lin, X. W. ; Watte, J. ; Wuyts, K. ; Swider, W. ; Silverans, R. E. ; Liliental-Weber, Z. ; Washburn, J.

Pub. info.:	Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.295-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	337

Conference Proceedings

9. Correlation Between the Standard Deviation of Sheet Resistance and the Temperature of Rapid Thermal Annealing

Lin, X. W. ; Pramanik, D.

Pub. info.:	Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.181-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	429

10.

Conference Proceedings

10. ERBIUM DOPING OF SILICON AND SILICON CARBIDE USING ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION

Boucaud, P. ; Julien, F.-H. ; Lourtioz, J.-M. ; Bernas, H. ; Clerc, C. ; Chaumont, J. ; Bodnar, S. ; Regolini, J.-L. ; Lin, X. W.

Pub. info.:	Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.141-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	354

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