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Conference Proceedings

1. Polishing Glass-Ceramic Based Rigid Disk

Chen, S.Y. ; Lin, S.C. ; Ho-Cheng, H.

Pub. info.:	Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005. pp.1213-1218, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	505-507

Conference Proceedings

2. Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures(AFS-TS)

Doong, K.Y.-Y. ; Hsieh, S. ; Lin, S.C. ; Wang, J.R. ; Shen, B. ; Hung, L.J. ; Guo, J.C. ; Chen, I.C. ; Young, K.L. ; Hsu, C.C.-H.

Pub. info.:	Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.81-87, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4692

Conference Proceedings

3. Library-based process test vehicle design framework

Doong, K.Y.-Y. ; Hung, L.-J. ; Ho, S. ; Lin, S.C. ; Young, K.L.

Pub. info.:	Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.188-196, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5042

Conference Proceedings

4. Session I: Optic-Mechatronic Technology Parametric Study of Spherical Micro-Lens Array

Shyu, R.F. ; Pan, C.T. ; Lin, S.C.

Pub. info.:	Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005. pp.595-600, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	505-507