1.

Conference Proceedings
Conference Proceedings
1. Position tracking control of an optical pick-up device using piezoceramic actuator
Choi,S.-B. ; Kim,H.-K. ; Lim,S.-C. ; Kim,J.
Pub. info.: Smart structures and materials 2000 : mathematics and control in smart structures : 6-9 March, 2000, Newport Beach, USA.  pp.370-376,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3984
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of lens aberrations depending on the transmittance of DUV-attenuated PSM
Park,J.-H. ; Kim,Y.-H. ; Lim,S.-C. ; Lee,K.-H. ; Choi,S.-W. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.937-942,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. Noncontact start/stop motion control of HDD suspension using shape memory alloy actuators
Lim,S.-C. ; Park,J.-S. ; Choi,S.-B. ; Park,Y.-P.
Pub. info.: Smart structures and materials 2001 : modeling, signal processing, and control in smart structures : 5-8 March, 2001, Newport Beach, USA.  pp.388-396,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4326
4.

Conference Proceedings
Conference Proceedings
4. Investigation on application of chromium-based materials to attenuated phase-shift masks for DUV exposure
Hong,S. ; Kim,E. ; Jiang,Z.-T. ; Bae,B.-S. ; No,K. ; Shin,W. ; Lim,S.-C. ; Woo,S.-G. ; Koh,Y.-B.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.134-137,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
5.

Conference Proceedings
Conference Proceedings
5. Application of alternating phase-shifting masks to sub-quarter-micrometer contact holes
Lim,S.-C. ; Kye,J.-W. ; Woo,S.-G. ; Kim,S.-G. ; Kang,H.-Y. ; Han,W.-S. ; Koh,Y.-B.
Pub. info.: Optical Microlithography IX.  Part2  pp.516-523,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
6.

Conference Proceedings
Conference Proceedings
6. Application of alternating phase-shifting masks to 200-nm contact holes
Lim,S.-C. ; Woo,S.-G. ; Park,C.-G. ; Koh,Y.-B.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.243-254,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
7.

Conference Proceedings
Conference Proceedings
7. Detection of microcalcifications ROI in digital mammograms using two stages of neural networks
Lee,Y. ; Lim,S.-C. ; Park,D.-S.
Pub. info.: Neural Network and Distributed Processing.  pp.32-38,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4555
8.

Conference Proceedings
Conference Proceedings
8. Current status of mask CD uniformity as related to e-beam system
Lim,S.-C. ; Kim,B.-G. ; Choi,S.-W. ; Lee,K.-H. ; Cho,H.-J. ; Yu,Y.-H. ; Cho,H.-K. ; Sohn,J.-M.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.301-311,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
9.

Conference Proceedings
Conference Proceedings
9. Side-lobe suppression in halftone PSM with optical proximity correction
Shin,I.-G. ; Lim,S.-C. ; Woo,S.-G. ; Han,W.-S. ; Koh,Y.-B.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.291-299,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621