1.

Conference Proceedings
Conference Proceedings
1. Abatement of Greenhouse Gases Using Surface Wave Plasmas
Wofford, B. ; Vartanian, V. ; Beu, L. ; Lii, T. ; Worth, W.F. ; Hartz, C.L. ; Bevan, J.W.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.79-94,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-8
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Polysilicon Gate Etch with Ultra Thin Gate Oxide (<35 A゜) in a Decoupled Plasma Source Etcher
Lii, T. ; Park, E. ; Lutz, J. ; Wu, W. ; Simpson, L. ; Mui, D.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.79-84,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
3.

Conference Proceedings
Conference Proceedings
3. POLYIMIDE PLANARIZATION WITH POLYSTYRENE BY RIE ETCH-BACK
Ng, H. Y. ; Lii, T. ; Jaso, M.
Pub. info.: Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A..  pp.265-272,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 227