1.

Conference Proceedings
Conference Proceedings
1. High-resolution near-field mask repair with femtosecond laser
Shani,Y. ; Melnick,I. ; Yoffe,S. ; Sharon,Y. ; Lieberman,K.S. ; Terkel,H.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.112-120,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
2.

Conference Proceedings
Conference Proceedings
2. High-resolution deep-UV laser mask repair based on near-field optical technology
Lieberman,K.S. ; Terkel,H. ; Rudman,M. ; Ignatov,A. ; Lewis,A.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.481-488,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793