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14 results

Conference Proceedings

1. LOW-COVERAGE LASER DESORPTION OF IONS ON CHLORINATED COPPER SURFACES

Chen, L. ; Liberman, V. ; O'Neill, J. A. ; Osgood Jr., R. M.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.463-468, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

2. THE GROWTH OF HIGH-QUALITY MCT FILMS BY MBE USING IN SITU ELLIPSOMETRY

Svitashev, K.K. ; Dvoretsky, S.A. ; Shvets, V.A. ; Mardezhov, A.S. ; Sidorov, Yu.G. ; Nis, I.E. ; Varavin, V.S. ; Liberman, V. ; Remesnik, V.G.

Pub. info.:	Infrared detectors : materials, processing, and devices : symposium held April 14-16, 1993, San Francisco, California, U.S.A.. pp.135-142, 1994. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	299

Conference Proceedings

3. Testing of optical materials for 193-nm applications

Liberman, V. ; Rothschild, M. ; Sedlacek, J.H.C. ; Uttaro, R.S. ; Grenville, A. ; Bates, A.K. ; Van Peski, C.

Pub. info.:	Optical systems contamination and degradation : 20-23 July 1998, San Diego, California. pp.411-418, 1998. Bellingham, Wash., USA. SPIE
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3427

Conference Proceedings

4. Damage testing of partial reflectors for 157-nm laser calorimeters

Laabs, H. ; Jones, R.D. ; Cromer, C.L. ; Dowell, M.L. ; Liberman, V.

Pub. info.:	Laser-Induced Damage in Optical Materials: 2001. pp.332-338, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4679

Conference Proceedings

5. Studies of consequences of photo-acid generator leaching in 193-nm immersion lithography [6154-43]

Liberman, V. ; Switkes, M. ; Rothschild, M. ; Palmacci, S. T. ; Grenville, A.

Pub. info.:	Optical Microlithography XIX. pp.615416-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

6. Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists

Bloomstein, T.M. ; Sedlacek, J.H.C. ; Palmacci, S.T. ; Hardy, D.E. ; Liberman, V. ; Rothschild, M.

Pub. info.:	Optical Microlithography XVI. Part One pp.650-661, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

Conference Proceedings

7. 157-nm pellicles: polymer design for transparency and lifetime

French, R.H. ; Wheland, R.C. ; Qiu, W. ; Lemon, M.F. ; Blackman, G.S. ; Zhang, E. ; Gordon, J. ; Liberman, V. ; Grenville, A. ; Kunz, R.R. ; Rothschild, M.

Pub. info.:	Optical Microlithography XV. Part One pp.576-583, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

8. Long-term laser durability testing of optical coatings and thin films for 157-nm lithography

Liberman, V. ; Rorhschild, M. ; Palmacci, S.T. ; Efremow, N.N. ; Sedlacek, J.H.C. ; Grenville, A.

Pub. info.:	Optical Microlithography XV. Part One pp.568-575, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

9. Attenuating phase-shifting mask at 157 nm

Liberman, V. ; Rothschild, M. ; Spector, S.J. ; Krohn, K.E. ; Cann, S.C. ; Hien, S.

Pub. info.:	Optical Microlithography XV. Part One pp.561-567, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

10.

Conference Proceedings

10. Ambient effects on the laser durability of 157-nm optical coatings

Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Efremow, N.N., Jr. ; Sedlacek, J.H.C. ; Grenville, A.

Pub. info.:	Optical Microlithography XVI. Part One pp.487-498, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

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Author: Liberman, V.