1.

Conference Proceedings
Conference Proceedings
1. Focused Ion Beam Nano-Machined Structures for Strain Analysis by a Moire Technique
Li, Biao ; Xie, Huimin ; Zhang, Xin
Pub. info.: Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.199-204,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 741
2.

Conference Proceedings
Conference Proceedings
2. Direct Writing of 3D Microstructures Using a Scanning Laser System
Yu, Hui ; Gruntzig, Alexander ; Zhao, Yi ; Sharon, Andre ; Li, Biao ; Zhang, Xin
Pub. info.: Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A..  pp.455-462,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 782
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of Design and Performance of a Cryogenic MEMS Micropump Realized With Si-Based Diaphragm Using Combination of ZYGO/WYKO Interferometer and Raman Spectroscopy
Zhao, Yi ; Ludlow, Daryl ; Li, Biao ; Zhang, Xin
Pub. info.: Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A..  pp.253-258,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 782