1.

Conference Proceedings
Conference Proceedings
1. Atomic Vapor Deposition (AVDTM) process for High Performance HfO2 Dielectric Layers
Cosnier, V. ; Dabertrand, K. ; Blonkowski, S. ; Lhostis, S. ; Zoll, S. ; Morand, Y. ; Descombes, S. ; Guillaumot, B. ; Hobbs, C. ; Rochat, N. ; Rolland, G. ; Renault, O. ; Garros, X. ; Casse, M. ; Mitard, J. ; Lehnen, P. ; Miedl, S. ; Lindner, J. ; Schumacher, M.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.287-292,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
2.

Conference Proceedings
Conference Proceedings
2. Textured SrTiO3 Thin Films on SiO2/Si by Liquid Injection MOCVD Using a New Bimetallic Precursor
Lhostis, S. ; Audier, M. ; Senateur, J-P. ; Dubourdieu, C. ; Auvray, L.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.806-813,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8