1.

Conference Proceedings
Conference Proceedings
1. Effect of PEB temperature profile on CD for DUV resists
Lewellen,J.W. ; Gurer,E. ; Lee,E. ; Chase,L.C. ; Dulmage,L.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.45-54,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
2.

Conference Proceedings
Conference Proceedings
2. Characterization of low-viscosity photoresist coating
Krishna,M.S. ; Lewellen,J.W. ; Flores,G.E.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 2  pp.1323-1336,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
3.

Conference Proceedings
Conference Proceedings
3. Novel spin-coating technology for 248-nm/193-nm DUV lithography and low-k spin on dielectrics of 200-mm/300-mm wafers
Gurer,E. ; Zhong,T.X. ; Lewellen,J.W. ; Lee,E.C.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.805-817,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
4.

Conference Proceedings
Conference Proceedings
4. Novel wafer track-based resolution enhancement technology for 248-nm DUV lithography
Zhong,T.X. ; Gurer,E. ; Lewellen,J.W. ; Lee,E.C.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.793-804,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
5.

Conference Proceedings
Conference Proceedings
5. Preliminary calculations of ballistic bunch compression with thermionic cathode rf guns
Lewellen,J.W. ; Milton,S.V.
Pub. info.: Coherent electron-beam x-ray sources : techniques and applications : 31 July-1 August 1997, San Diego, California.  pp.162-171,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3154