1.

Conference Proceedings
Conference Proceedings
1. Processing Damage and Electrical Performance of Porous Dielectrics in Narrow Spaced Interconnects
Iacopi, F. ; Travaly, Y. ; Stucchi, M. ; Struyf, H. ; Peeters, S. ; Jonckheere, R. ; Leunissen, L.H.A. ; Tokei, Zs. ; Sutcliffe, V. ; Richard, O. ; Hove, M.Van ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.19-24,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
2.

Conference Proceedings
Conference Proceedings
2. Design of an electron projection system with slider lenses and multiple beams
Moonen, D. ; Leunissen, L.H.A. ; de Jager, P.W.H. ; Kruit, P. ; Bleeker, A.J. ; van der Mast, K.D.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.932-943,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
3.

Conference Proceedings
Conference Proceedings
3. Effects of different processing conditions on line-edge roughness for 193-nm and 157-nm resists
Ercken, M. ; Leunissen, L.H.A. ; Pollentier, I. ; Patsis, G.P. ; Constantoudis, V. ; Gogolides, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.266-275,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Toward a complete description of linewidth roughness: a comparison of different methods for vertical and spatial LER and LWR analysis and CD variation
Constantoudis, V. ; Patsis, G.P. ; Leunissen, L.H.A. ; Gogolides, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.967-977,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375