1.

Conference Proceedings
Conference Proceedings
1. Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region [5963-40]
Sandner, T. ; Schmidt, J. U. ; Schnenk, H. ; Lakner, H. ; Yang, M. ; Gatto, A. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.596314-596314,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
2.

Conference Proceedings
Conference Proceedings
2. Preparation and characterization of multilayers for EUV applications [5963-86]
Foltyn, Th. ; Braun, S. ; Friedrich, W. ; Leson, A. ; Menzel, M.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.59632C-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
3.

Conference Proceedings
Conference Proceedings
3. Deposition of multilayer mirrors with arbitrary period thickness distributions
Foltyn, T. ; Braun, S. ; Moss, M. ; Leson, A.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.124-133,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
4.

Conference Proceedings
Conference Proceedings
4. Ion-beam sputter deposition of x-ray multilayer optics on large areas [6317-16]
Gawlitza, P. ; Braun, S. ; Lipfert, S. ; Leson, A.
Pub. info.: Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA.  pp.63170G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6317
5.

Conference Proceedings
Conference Proceedings
5. Design and development of an optical system for EUV-microscopy
Foltyn, Th. ; Bergmann, K. ; Braun, S. ; Gawlitza, P. ; Leson, A. ; Neff, W. ; Walter, K.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.37-46,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
6.

Conference Proceedings
Conference Proceedings
6. Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Braun, S. ; Bendjus, B. ; Foltyn, T. ; Menzel, M. ; Schreiber, J. ; Leson, A.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA.  pp.75-84,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5533
7.

Conference Proceedings
Conference Proceedings
7. New laboratory EUV reflectometer for large optics using a laser plasma source
Loyen, L. ; Boettger, T. ; Braun, S. ; Mai, H. ; Leson, A. ; Scholze, F. ; Tuemmler, J. ; Ulm, G. ; Legall, H. ; Nickles, P.V. ; Sandner, W. ; Stiel, H. ; Rempel, C.E. ; Schulze, M. ; Brutscher, J. ; Macco, F. ; Muellender, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.12-21,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
8.

Conference Proceedings
Conference Proceedings
8. Multi component EUV multilayer mirrors
Braun, S. ; Foltyn, T. ; Loyen, L. ; Moss, M. ; Leson, A.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.274-285,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
9.

Conference Proceedings
Conference Proceedings
9. Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region (Invited Paper) [6114-19]
Sandner, T. ; Schmidt, J. U. ; Schenk, H. ; Lakner, H. ; Yang, M. ; Gatto, A. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: MOEMS Display, Imaging, and Miniaturized Microsystems IV.  pp.61140H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6114
10.

Conference Proceedings
Conference Proceedings
10. Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications
Sandner, T. ; Schmidt, J.U. ; Schenk, H. ; Lakner, H. ; Braun, S. ; Foltyn, T. ; Leson, A. ; Gatto, A. ; Yang, M. ; Kaiser, N.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.34-42,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721