1.

Conference Proceedings
Conference Proceedings
1. 157-nm pellicles: polymer design for transparency and lifetime
French, R.H. ; Wheland, R.C. ; Qiu, W. ; Lemon, M.F. ; Blackman, G.S. ; Zhang, E. ; Gordon, J. ; Liberman, V. ; Grenville, A. ; Kunz, R.R. ; Rothschild, M.
Pub. info.: Optical Microlithography XV.  Part One  pp.576-583,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings
Conference Proceedings
2. Immersion fluid refractive indices using prism minimum deviation techniques
French, R.H. ; Yang, M.K. ; Lemon, M.F. ; Synowicki, R.A. ; Pribil, G.K. ; Cooney, G.T. ; Herzinger, C.M. ; Green, S.E. ; Burnett, J.H. ; Kaplan, S.G.
Pub. info.: Optical Microlithography XVII.  pp.1689-1694,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. 157-nm pellicles for photolithography: mechanistic investigation of the deep-UV photolysis of fluorocarbons
Lee, K. ; Jockusch, S. ; Turro, N.J. ; French, R.H. ; Wheland, R.C. ; Lemon, M.F. ; Braun, A.M. ; Widerschpan, T. ; Zimmerman, P.
Pub. info.: Optical Microlithography XVII.  pp.1598-1605,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377