1.

Conference Proceedings
Conference Proceedings
1. CHARISMA: a new way for angular-resolved scattering measurements
Apel,O. ; Gorling,C. ; Leinhos,U. ; Mann,K.R. ; Schafer,B.
Pub. info.: Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado.  pp.569-578,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4347
2.

Conference Proceedings
Conference Proceedings
2. Stability of optical interference coatings exposed to low-fluence 193-nm ArF radiation
Heber,J. ; Thielsch,R. ; Blaschke,H. ; Kaiser,N. ; Mann,K.R. ; Eva,E. ; Leinhos,U. ; Gortler,A.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.1041-1047,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings
Conference Proceedings
3. Long-term test and characterization of optical components at 193 nm and 157 nm
Vogler,K. ; Klaft,I. ; Schroder,T. ; Stamm,U. ; Mann,K.R. ; Apel,O. ; Gorling,C. ; Leinhos,U.
Pub. info.: Inorganic optical materials II : 1-3 August, 2000, San Diego, USA.  pp.255-260,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4102
4.

Conference Proceedings
Conference Proceedings
4. Interfacial absorption of DUV coatings
Apel,O. ; Schulz-Grosser,M. ; Leinhos,U. ; Kennedy,M. ; Mann,K.R. ; Schuhmann,R.G.
Pub. info.: Laser-induced damage in optical materials, 2000 : 32nd Annual Boulder Damage Symposium, proceedings, 16-18, October, 2000, Boulder, Colorado.  pp.17-23,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4347
5.

Conference Proceedings
Conference Proceedings
5. Microstructure and radiation interactions of optical interference coatings for 193-nm applications
Heber,J. ; Thielsch,R. ; Blaschke,H. ; Kaiser,N. ; Leinhos,U. ; Gortler,A.
Pub. info.: Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany.  pp.159-165,  1999.  Bellingham, WA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3738
6.

Conference Proceedings
Conference Proceedings
6. Testing of optical components for microlithography at 193- and 157-nm
Mann,K.R. ; Apel,O. ; Eckert,G. ; Gorling,C. ; Leinhos,U. ; Schafer,B.
Pub. info.: Optical Microlithography XIV.  4346  pp.1340-1348,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
7.

Conference Proceedings
Conference Proceedings
7. Changes in optical interference coatings exposed to 193-nm excimer laser radiation
Heber,J. ; Thielsch,R. ; Blaschke,H. ; Kaiser,N. ; Leinhos,U. ; Gortler,A.
Pub. info.: Laser-Induced Damage in Optical Materials: 1998.  pp.83-96,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3578