1.

Conference Proceedings
Conference Proceedings
1. Electrical Measurements of Annealed Boron Implants for Shallow Junctions
Fiory, A.T. ; Baurdelle, K.K. ; Lefrancois, M.E. ; Camm, D.M ; Agarwal, A.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.133-140,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Source/Drain Extension Formed by Impulse Anneal
Lefrancois, M.E. ; Camm, D.M. ; McCoy, S. ; Elliott, K.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.297-304,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9