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24 results

Conference Proceedings

1. Novel antireflective structure for metal layer patterning

Choi,S.-S. ; Cha,H.S. ; Kim,J.-S. ; Park,J.M. ; Kim,D.H. ; Lee,K.H. ; Ahn,J. ; Chung,H.B. ; Kim,B.W.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.336-346, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

2. Design of illumination aperture for ArF exposure system with wide exposing latitude

Choi,S.-S. ; Cha,H.S. ; Kim,J.-S. ; Lee,K.H. ; Kim,D.H. ; Chung,H.B. ; Kim,D.Y.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.792-799, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

3. Alignment system for ArF excimer-laser-based step-and-scan system

Kim,D.H. ; Kim,J.S. ; Sohn,Y.J. ; Kwon,J.H. ; Lee,K.H. ; Choi,S.-S. ; Chung,H.B. ; Yoo,H.J. ; Kim,B.W.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.958-970, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

4. Design of illumination system for ArF excimer laser step-and-scanner

Lee,K.H. ; Kim,D.H. ; Kim,J.S. ; Choi,S.-S. ; Chung,H.B. ; Yoo,H.J. ; Kim,B.W.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.997-1004, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

5. Portable and inexpensive diode laser/fiber optic spectrometer and its application to the determination of ammonia in environmental samples

Kim,S.H. ; Noh,Y.S. ; Byun,G.S. ; Lee,K.H. ; Seo,D.S.

Pub. info.:	Chemical, biochemical, and environmental fiber sensors X : 2-3 November 1998, Boston, Massachusetts. pp.91-96, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3540

Conference Proceedings

6. Determining the most likely site and mode of thermomechanical failure in multimaterial systems

Tay,A.A.O. ; Lee,K.H. ; Zhou,W. ; Lim,K.M.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.368-380, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4408

Conference Proceedings

7. Microstructural Investigation of Grain Boundary Diffusion and Recrystallization in W-Cu Composites

Lee,J.S. ; Kim,T.H. ; Lee,K.H.

Pub. info.:	Intergranular and interphase boundaries in materials : iib92 : proceedings of the 6th International Congress, Thessaloniki, Greece, June 21-26, 1992. pp.399-402, 1993. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	126-128

Conference Proceedings

8. Temperature Dependent Top Layer Composition of Pd on Cu(100)

Koymen,A.R. ; Lee,K.H. ; Yang,G. ; Zhou,H. ; Weiss,A.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.3 pp.1411-1414, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

Conference Proceedings

9. Positron Annihilation Induced Auger Electron Emission from Polycrystalline Fe,Cu,Pd and Au

Lee,K.H. ; Koymen,Ali R. ; Mehl,D. ; Jensen,K.O. ; Weiss,A.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.3 pp.1415-1418, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

10.

Conference Proceedings

10. Investigation of Positron States at the Cs/Cu(100)Surface Using Positron Annihilation Induced Auger Electron Spectroscopy(PAES)

Koymen,A.R. ; Lee,K.H. ; Mehl,D. ; Weiss,A.

Pub. info.:	Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary. Pt.3 pp.1407-1410, 1992. Aederlmannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	105-110

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Author: Lee,K.H.