1.

Conference Proceedings
Conference Proceedings
1. Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching
Lee,J.-Y. ; Kim,S.-H. ; Lim,H.-T. ; Kim,C.-H. ; Kim,Y.-K.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.250-260,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Measurements of the effective optical constants and the flying height of read-write sliders by heterodyne inteferometry
Lee,J.-Y. ; Su,D.-C. ; Hsu,C.-C.
Pub. info.: Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan.  pp.40-43,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3740
3.

Conference Proceedings
Conference Proceedings
3. Pattern recognition application in classification of intelligent composites during smart manufacturing using a C4.5 machine learning program
Talaie,A. ; Esmaili,N. ; Lee,J.-Y. ; Kosaka,T. ; Oshima,N. ; Osaka,K. ; Asano,Y. ; Fukuda,T.
Pub. info.: Smart structures and devices : 13-15 December 2000, Melbourne, Australia.  pp.217-227,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4235
4.

Conference Proceedings
Conference Proceedings
4. Complex refractive index measurements based on Fresnel's equations and the uses of a lock-in amplifier
Su,D.-C. ; Chiu,M.-H. ; Lee,J.-Y.
Pub. info.: Three-dimensional imaging, optical metrology, and inspection V : 19-20 September 1999, Boston, Massachusetts.  pp.22-31,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3835
5.

Conference Proceedings
Conference Proceedings
5. Measurement of thermal expansion coefficient of poly-Si using microgauge sensors
Chae,J.-H. ; Lee,J.-Y. ; Kang,S.-W.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.202-211,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
6.

Conference Proceedings
Conference Proceedings
6. Improved method for measuring refractive index of a medium
Su,D.-C. ; Lee,J.-Y.
Pub. info.: Laser interferometry IX : techniques and analysis : 20-21 July 1998, San Diego, California.  pp.245-252,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3478
7.

Conference Proceedings
Conference Proceedings
7. Analysis of dry etch loading effect in mask fabrication
Lee,J.-Y. ; Cho,S.-Y. ; Kim,C.-H. ; Lee,S.-W. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.609-615,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
8.

Conference Proceedings
Conference Proceedings
8. Resolution improvement of chemical-amplification resist using process-induced effect correction
Choi,J.-H. ; Kim,C.-Y. ; Lee,J.-Y. ; Moon,S.-W. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.298-305,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
9.

Conference Proceedings
Conference Proceedings
9. Extended capability of laser writer for masks beyond 180-nm nodes
Cho,S.-Y. ; Lee,J.-Y. ; Kim,C.-H. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.9-15,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
10.

Conference Proceedings
Conference Proceedings
10. Layered video coding for multimedia applications
Lee,J.-Y. ; Kim,T.-H. ; Ko,S.-J.
Pub. info.: Multimedia Systems and Applications.  pp.509-517,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3528