1.

Conference Proceedings
Conference Proceedings
1. Vision-based precision inspection system for profile and performance of small and micro gears using the intelligent image processing techniques and virtual master gears
Pahk,H.J. ; Hwang,Y.M. ; Lee,I.H. ; Ahn,W.J.
Pub. info.: Process Control and Inspection for Industry.  pp.48-53,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4222
2.

Conference Proceedings
Conference Proceedings
2. Double-step process for manufacturing reticle to reduce gate CD variation
Kozuma,M. ; Komatsu,M. ; Arakawa,R. ; Kubo,S. ; Takahashi,T. ; Jensen,J. ; Bang,H.S. ; Lee,I.H. ; Shin,C. ; Kim,H.-S. ; Park,K.W.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.787-792,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186