1.

Conference Proceedings
Conference Proceedings
1. Effect of PEB temperature profile on CD for DUV resists
Lewellen,J.W. ; Gurer,E. ; Lee,E. ; Chase,L.C. ; Dulmage,L.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.45-54,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
2.

Conference Proceedings
Conference Proceedings
2. Characterization of sub-0.18-ｦﾌm critical dimension pattern collapse for yield improvement
Zhong,T.X. ; Gurer,E. ; Lee,E. ; Bai,H. ; Gendron,B. ; Krishna,M.S. ; Reynolds,R.M.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.158-168,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
3.

Conference Proceedings
Conference Proceedings
3. Electromigration performance improvement of Al-Si-Cu/TiN/Ti/n+Si contact
Shi,G. ; Sun,Z. ; Xu,G.-F. ; Min,Y.-H. ; Luo,J.-Y. ; Lu,Y. ; Li,B.-Z. ; Qu,X.-P. ; Qian,G. ; Doan,M.T. ; Lee,E.
Pub. info.: Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China.  pp.274-279,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3175
4.

Technical Paper
Technical Paper
4. A System Design of Stratospheric Airships for the Navigation in Korea
Shin,M. ; Lee,E. ; Lee,Y. ; Hur,J.
Pub. info.: A collection of technical papers : AIAA Guidance, Navigation and Control Conference, Montreal, Canada 6-9 August 2001.  Pt. 2  pp.809-815,  2001.  Reston, VA.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Guidance Navigation and Control Conference
Ser. no.: 2001
5.

Conference Proceedings
Conference Proceedings
5. Integrated yield and CD enhancement for advanced DUV Lithography
Krishna,M.S. ; Gurer,E. ; Zhong,T.X. ; Lee,E. ; Salois,J.W. ; Reynolds,R.M.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.56-64,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884