1.

Conference Proceedings
Conference Proceedings
1. The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS
Lee, Sang-Ho ; Kwon, Myong-Jong ; Park, Jin-Goo ; Kim, Yong-Kweon ; Shin, Hyung-Jae
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.143-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Conference Proceedings
Conference Proceedings
2. The Formation of Water Marks on Both Hydrophilic and Hydrophobic Wafers
Park, Jin-Goo ; Han, Jeung-Hoon ; Kim, Seung-Hwan ; Lee, Sang-Ho
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.513-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477