Zhao, F.F. ; Shen, Z.X. ; Zheng, J.Z. ; Gao, W.Z. ; Osipowicz, T. ; Pang, C.H. ; Lee, P.S. ; See, A.K.
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.41-46, 2002. Warrendale. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.135-140, 2004. Warrendale, Pa.. Materials Research Society