1.

Conference Proceedings
Conference Proceedings
1. Real Time Intrusive Optical Emission Spectroscopy for Process Control
Lee, P-W. ; Kim, Y-J. ; Seo, S.H. ; Kim, J-H. ; Chang, H-Y.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.208-217,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
2.

Conference Proceedings
Conference Proceedings
2. Characteristics of an Inductively Coupled C12/Ar Plasma and its Application to Cu Etching
Seo, S-H. ; Kim, J-H. ; Lee, P-W. ; Chang, H-Y.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.327-338,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
3.

Conference Proceedings
Conference Proceedings
3. Determination of the Relative F Concentration and its Radial Profile by Plasma Parameter Normalization in an Electron Cyclotron Resonance SF6/Ar Discharge
Kim, Y-J. ; Lee, P-W. ; Chang, H-Y. ; Chang, C.S.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.339-349,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2