1.

Conference Proceedings
Conference Proceedings
1. Mask-induced polarization effects at high NA
Lee, S. U. ; Park, J. L. ; Choi, J. S. ; Lee, J. G.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.555-566,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Understanding the photoresist surface-liquid interface for ArF immersion lithography
Lim, Y. H. ; Kim, Y. K. ; Choi, J. S. ; Lee, J. G.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.64-77,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings
Conference Proceedings
3. Factors Affecting Passivation and Resistivity of Cu(Mg) Alloy Film
Cho, H. L. ; Lee, J. G.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.353-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. The analysis of the criteria of phase error by evaluating the influence of lens aberration on the lithographic performance
Jeong, C.-Y. ; Ahn, J.-K. ; Park, K.-Y. ; Choi, J. S. ; Lee, J. G.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1681-1692,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
5.

Conference Proceedings
Conference Proceedings
5. Synthetic Control of Nanostructured Carbons Templated by Mesoporous SBA-15 Silica
Yoon, S. B. ; Kim, J. Y. ; Yu, J. -S. ; Kim, J. -W. ; Chang, S. ; Lee, J. G.
Pub. info.: Recent advances in the science and technology of zeolites and related materials : proceedings of the 14th International Zeolite Conference, Cape Town, South Africa, 25-30th April 2004.  pp.917-923,  2004.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 154
6.

Conference Proceedings
Conference Proceedings
6. Enhanced Adhesion of Cu Film on a Low-k Material by Using Ti Glue Layer, B Dopant and NU2 Plasma Treatment
Ko, Y. K. ; Lee, S. ; Yang, H. J. ; Shim, C. ; Jung, D. ; Lee, J. G.
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.497-502,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766
7.

Conference Proceedings
Conference Proceedings
7. The feasibility study of KrFHT-PSM in ArF lithography process [6154-165]
Lim, Y. H. ; Kim, H. I. ; Choi, J. S. ; Lee, J. G.
Pub. info.: Optical Microlithography XIX.  pp.61544A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. Synthesis of inorganic thin-layer-coated carbon nanotubes toward passivated nanoprobes (Invited Paper)
Ikuno, T. ; Kishida, M. ; Lee, J. G. ; Honda, S. ; Katayama, M. ; Mori, H. ; Oura, K.
Pub. info.: Nanosensing: Materials and Devices.  pp.18-27,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5593