1.

Conference Proceedings
Conference Proceedings
1. Selective Epitaxial Growth of SiGe Films in LPCVD Reactor Systems- Characterization of SiGe Films by Ellipsometry
Lee, I.M. ; Wang, W.C. ; Koh, M.T.K. ; Denton, J.P. ; Takoudis, C.G. ; Kram, E.P. ; Neudeck, G.W.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1348-1355,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Water Vapor and Chlorine Effects on the Epitaxial Growth of SiGe Films by CVD
Lee, I.M. ; Jansons, A. ; Takoudis, C.G.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.123-130,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25